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Micronova Cleanrooms

Micronova and its Cleanrooms provide unique research and development infrastucture in the field of microelectronics and nanotechnology for VTT, Aalto University and companies. It is the largest R&D Cleanroom in Nordic countries fully equipped for fabrication of silicon based microstructures. Also small scale production of microelectronic devices like MEMS, sensors, RF- and optical devices is offered. Tech transfer for high volume production.

• Complete silicon fabrication line for processing 150mm wafers
• Fabry-Perot Interferometer based microspectrometers
• Versatile cavity-SOI based platform for different MEMS sensors
• Silicon photonics
• Nanoelectronic and quantum devices
• Active devices (radiation detectors, JFET)
• Millimeter wave devices, integrated passive devices

VTT, Knowledge intensive products and systems, Tietotie 3, Otaniemi, 02150 Espoo

Contact: Rupprecht Howard
tel. +358407360685Howard.Rupprecht@vtt.fi

Heini Saloniemi
tel. +358 40 733 4719
heini.saloniemi@vtt.fi

Jukka Vähäsarja
tel. +358503489599
Jukka.Vahasarja@vtt.fi

Jyrki Kiihamäki
tel. +358 40 506 9276
jyrki.kiihamaki@vtt.fi

Web site: https://www.vttmemsfab.fi/

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